We are expert service provider for EXCIMER Laser system.

We offer service of re-marketing, repairs service, excimer laser refurbishments, and relocation services. Established the RD Lab Center and workshop in Taiwan. Warehouse for excimer laser spare parts stock.

Technology Service Item:

  • Excimer Laser system maintain and Repair service
  • Excimer Laser system Refurbishment and Retrofit
  • Excimer Laser system relocation service
  • Excimer Laser equipment parts trading
  • Customized Spare parts development

HVPS Repair ISO9001:2015/CNS 12681

Registration Number: 17QMA31224

Excimer Laser Repair Item:

  • Excimer Laser Discharge Chambers (LDU)
  • Output Coupler Lens (OC Lens)
  • Laser beam shutter
  • High Voltage Power Supply (HVPS LC1202)
  • Gas module
  • Blower motor controller
  • Cryo pump

Other miscellaneous parts:

  • Ultra 10 workstation
  • Lens A / B / C
  • ASML, NIKON, CANON parts improvement
  • MV10A gas valve
  • Gas Manifold valve repair
  • Tube pressure sensor