EXCIMER LASER REPAIR

We are expert service provider for EXCIMER Laser system.

We offer service of re-marketing, repairs service, excimer laser refurbishments, and relocation services. Established the RD Lab Center and workshop in Taiwan. Warehouse for excimer laser spare parts stock.

Technology Service Item:

• Excimer Laser system maintain and Repair service
• Excimer Laser system Refurbishment and Retrofit
• Excimer Laser system relocation service
• Excimer Laser equipment parts trading
• Customized Spare parts development

HVPS Repair ISO9001:2015/CNS 12681

Registration Number: 17QMA31224

Excimer Laser Repair Item:

• Excimer Laser Discharge Chambers (LDU)
• Output Coupler Lens (OC Lens)
• Laser beam shutter
• High Voltage Power Supply (HVPS LC1202)
• Gas module
• Blower motor controller
• Cryo pump

Other miscellaneous parts:

• Ultra 10 workstation
• Lens A / B / C
• ASML, NIKON, CANON parts improvement
• MV10A gas valve
• Gas Manifold valve repair
• Tube pressure sensor